Capacitive Accelerometer Laboratory Using Polymer-Film Rapid Prototyping Technology

Antonio Gellineau,  Ali Rastegar,  Roger Howe
Stanford University


We present a rapid prototyping substitute for silicon MEMS Fabrication, which allows students to understand the fundamental tradeoffs in designing a planar accelerometer. The laboratory allows students to develop their own designs using fundamental theory of beams and electrostatics. These designs are then realized using commercially available polymer-films and a CO2 laser cutter for device fabrication and assembled by hand using polyimide double-sided tape. The performance of the student’s designs were tested using front-end circuits they analyzed and assembled.